High Purity Custom Quartz Furnace Tube Large Diameter For Semiconductor

1. Ultra-High Purity – Core of Clean Processes

• SiO₂ purity ≥ 99.99%, premium grades up to 99.995%
• Extremely low metal ion content (Na/K/Fe etc. < 1ppm)
• No devitrification, volatilization or particle shedding at high temperatures
• The "first line of defense" for semiconductor wafer yield — a contaminated furnace tube can ruin an entire wafer batch

2. Extreme Heat Resistance – Stable at Large Diameters

• Long-term service temperature 1100°C – 1200°C, short-term up to 1350°C+
• Softening point approx. 1700°C — large-diameter tubes resist sagging and deformation at high temperatures
• Compatible with mainstream high-temperature processes: diffusion, oxidation, annealing, LPCVD

3. Uniform Temperature – Stable Thermal Field

• Excellent thermal conductivity and radiant heat transfer of quartz material
• Uniform wall thickness ensures a consistent temperature field inside the furnace
• Works with temperature control systems for precise control at ±0.5°C level
• Ensures identical process conditions for every wafer

4. Ultra-Low Thermal Expansion – Superior Thermal Shock Resistance

• Thermal expansion coefficient of only 5.5×10⁻⁷/°C (near-zero expansion)
• Outstanding thermal shock resistance — no cracking under frequent heating/cooling cycles
• Dimensionally stable after repeated thermal cycling — no long-term warping or deformation

5. Strong Corrosion Resistance – Tolerates Process Atmospheres

• Resists strong acids (except HF) and most process gases
• No reaction with chlorine, oxygen or dopant gases (phosphine / diborane etc.) at high temperatures
• Resists erosion and deposit buildup — easy to clean, long service life

6. Fully Transparent – Observation & Radiant Heating

• Fully transparent walls with high UV-to-IR transmittance
• Supports infrared radiant heating for high thermal efficiency
• Real-time visibility of furnace conditions for easy process monitoring

7. Precise Dimensions – Fits Various Furnace Types

• Strict control of tube diameter, wall thickness and length tolerances
• Excellent straightness, roundness and wall thickness uniformity
• Compatible with mainstream horizontal and vertical furnace models
• Custom manufacturing supported per equipment drawings

8. Complete Specifications – Deep Customization

• Outer diameter: φ40mm – φ500mm (larger available on request)
• Wall thickness: 2mm – 15mm options
• Length: customizable up to 3 meters or more
• Structures: straight tube, open both ends, sealed one end, flanged tube
• Processing: flame-polished ends, polishing, chamfering, flange fitting
• Accessories: quartz boats, tube plugs and support components available