One-Piece Formed Quartz Flange Tube Ultra High Purity Zero Contamination High Temperature Resistant for Semiconductor Gas Lines

1. One-Piece Forming – Reliable Sealing

• Flange and tube body formed in one piece or precision-welded — no weld seam leakage risk
• Precision-ground end faces with high flatness and smooth finish
• Excellent vacuum sealing performance with O-rings / gaskets
• Meets high-vacuum and positive-pressure gas-tightness requirements

2. Ultra-High Purity – Zero Contamination

• SiO₂ purity ≥ 99.99%, premium grades up to 99.995%
• No devitrification, volatilization or particle shedding at high temperatures
• Zero metal contamination in semiconductor process gas lines
• Safeguards wafer / device process yield

3. Extreme Heat Resistance for Demanding Processes

• Long-term service temperature 1100°C – 1200°C, short-term up to 1400°C+
• Flange area withstands the same temperatures as the tube body — no weak points
• Compatible with diffusion furnaces, CVD, epitaxy and other high-temperature processes

4. Thermal Shock Resistant – Strong Crack Resistance

• Ultra-low thermal expansion coefficient (5.5×10⁻⁷/°C)
• No cracking or deformation under repeated heating and cooling cycles
• Low thermal stress at the flange-to-tube joint — long service life

5. Strong Corrosion Resistance – Chemical Inertness

• Resists strong acids (except HF) and various corrosive process gases
• No reaction with chlorine, halides, oxygen etc. at high temperatures
• Resists erosion and deposition — stable long-term performance

6. Precise Dimensions – Excellent Installation Compatibility

• Strict control of flange OD, bolt-hole spacing and end-face flatness
• Precise tolerances on tube OD, wall thickness and length
• Quick alignment and installation with standard metal flanges and seals
• Custom manufacturing supported per equipment drawings

7. Complete Specifications – Deep Customization

• Flange types: flat flange, KF flange, CF flange, custom-shaped flange
• Tube diameter: φ10mm – φ300mm (larger available on request)
• Length: customizable as required, up to 3 meters or more
• Structures: single-ended flange, double-ended flange, flange + reducer, flange + end cap
• Processing: end-face grinding, polishing, chamfering, flame-polished openings